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Brand: Brooks Instrument
Brooks Instrument SLA5800 Series Thermal Mass Flow Controller
Description
Digital gas mass flow control from laboratory flows to 2500 slpm
The SLA5800 Series from Brooks Instrument is a family of elastomer-sealed, digital thermal mass flow controllers and meters for general-purpose gas service. The controllers are the SLA5850, SLA5851 and SLA5853; the matching meters are the SLA5860, SLA5861 and SLA5863. Brooks positions the series for chemical and petrochemical research, laboratory, analytical, fuel cell and life science work, where a repeatable mass flow of gas has to be set and held without recalibrating every few weeks.
Three body sizes cover the range. The small body handles 0.003 to 50 slpm of nitrogen equivalent, the mid body 15 to 150 slpm, and the large body 100 to 2500 slpm. The datasheet states a long-term zero stability of better than 0.2 percent of full scale per year, an accuracy of 0.6 percent of setpoint for 17025-certified devices on the small and mid bodies, and a response time under one second on the small and mid bodies.
Technical specifications
| Parameter | Specification |
|---|---|
| Controller models | SLA5850, SLA5851, SLA5853 |
| Meter models | SLA5860, SLA5861, SLA5863 |
| Full-scale range (N2 eq., 0 C ref) | 0.003 to 50 slpm (5850/60); 15 to 150 slpm (5851/61); 100 to 1100 slpm and above 1100 to 2500 slpm (5853/63) |
| Accuracy, 17025-certified devices | +/-0.6% of setpoint (20 to 100% FS), +/-0.12% FS below 20% FS; +/-0.6% FS on size 53/63 |
| Accuracy including calibration uncertainty (SEMI E69) | +/-0.9% of setpoint, +/-0.18% FS below 20% FS; +/-1.0% FS on size 53/63 |
| Control range | 1 to 100% of full scale, 100:1 for 1 to 50 slpm; 50:1 for other full-scale flows |
| Repeatability and reproducibility | 0.20% of setpoint |
| Response time (within 2% FS, 0 to 100% step) | Under 1 second (5850/51/60/61); under 3 seconds (5853/63) |
| Zero stability | Under 0.2% FS per year |
| Temperature coefficient | Zero under 0.05% FS per C; span under 0.1% of setpoint per C |
| Operating temperature | -14 to 65 C; hazardous-area certifications 0 to 65 C |
| Minimum differential pressure (controllers) | 5 psi (0.35 bar) size 50; 10 psi (0.69 bar) size 51; size 53 from 7.5 psi at 500 lpm to 35 psi at 2500 lpm |
| Maximum operating pressure | 1500 psi / 103 bar (sizes 50, 51); 1000 psi / 69 bar (size 53); 4500 psi special on SLA5861 only |
| External leak integrity | 1×10-9 atm cc/sec He |
| Valve shut-down (leak-by) | Under 1% FS standard; improved shut-off with Biotech package |
| Wetted materials | 316 and 316/316L stainless steel, high alloy, Viton, Buna-N, Kalrez, Teflon/Kalrez, EPDM |
| Digital interfaces | RS485, Profibus, DeviceNet, EtherCAT, EtherNet/IP, PROFINET |
| Analog I/O | 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
| Hazardous area | UL Class I Div 2 and Zone 2 recognized; ATEX II 3 G Ex nA IIC T4 Gc; IECEx; KOSHA |
| Service port | RS485 via 2.5 mm jack |
Choosing the body size, valve and communications
The ordering code is built in thirteen positions. The function digit selects a mass flow controller (5) or meter (6), the body-size digit selects 0, 1 or 3 by flow range, and a communication letter chooses analog only, RS485, Profibus, DeviceNet, EtherCAT, EtherNet/IP or PROFINET. Mechanical connections cover compression, VCR, VCO, NPT, BSP and sanitary fittings on the small and mid bodies, and in addition ANSI and DIN flanges on the large body. O-ring and valve seat materials include Viton, Buna, PTFE, Kalrez and EPDM, and the valve is normally closed, normally open or absent for a meter.
Position XII adds optional packages. The Biotech Performance package brings higher turndown, an enhanced valve with very low leak-by and pre-calibrated multi-gas pages for air, CO2, N2 and O2. The Premium package adds FDA/USP Class VI elastomers and material certificates.
What to confirm before ordering
Send the gas, full-scale flow, inlet and outlet pressure, operating temperature, fitting, valve type, power supply, communication protocol and any hazardous-area requirement. The datasheet notes that performance at minimum inlet pressure depends on gas and flow range, and that more than 40 psig inlet is needed above 100 lpm of nitrogen equivalent. If you are replacing an existing controller, the full code from its nameplate lets us compare it against the Brooks code structure.
Documents and quotation
The manufacturer datasheet (11 pages) is attached to this page as a download. For a quotation, send the full model code and the process data to Seven Star LLC in Muscat; browse more instruments in the Flowmeters category. We supply this item as an independent supplier, so please confirm availability and delivery with us.
Datasheets & Documents
- Datasheet Brooks Instrument SLA5800 Series datasheet (Data-Sheet-SLA5800-EN, 2026-07) Download
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About brand
Brooks Instrument is a manufacturer of flow and pressure instruments, best known for thermal and Coriolis mass flow controllers and meters and for variable area (rotameter) flow meters. Founded in 1946 and headquartered in Hatfield, Pennsylvania, the company is part of Illinois Tool Works. Seven Star LLC lists selected Brooks Instrument models with their manufacturer datasheets for engineers who need to specify or replace a flow instrument.
Mass flow controllers and meters
The Brooks Instrument catalogue includes elastomer-sealed and metal-sealed thermal mass flow controllers, MultiFlo gas and range programmable models, pressure-based controllers and low-flow Coriolis meters for liquids and gases. Digital and analog interfaces cover RS485, DeviceNet, Profibus, EtherCAT, EtherNet/IP and PROFINET. Several lines are designed for semiconductor and high-purity gas panels, so check the datasheet before choosing one for general industrial gas.
Variable area flow meters
Brooks Instrument also makes metal tube and glass tube variable area meters, including the MT3809G and MT3750C metal tube meters, the GT1600 and the Sho-Rate glass tube rotameters. They indicate flow locally without power, with optional alarms, transmitters and needle valves.
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Frequently Asked Questions
Which models does the SLA5800 Series include?
Controllers SLA5850, SLA5851 and SLA5853, and meters SLA5860, SLA5861 and SLA5863, according to the Brooks datasheet.
What flow range does the series cover?
From 0.003 slpm up to 2500 slpm nitrogen equivalent, split across three body sizes.
Which digital protocols are offered?
RS485, Profibus, DeviceNet, EtherCAT, EtherNet/IP and PROFINET, plus analog voltage and current I/O.
Is a hazardous-area version available?
The datasheet lists UL Class I Div 2 and Zone 2, ATEX Zone 2, IECEx and KOSHA options through code position XIII.
What information is needed for a quotation?
Gas, flow range, pressures, fitting, valve type, power, protocol and certification, ideally as the full Brooks model code.
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