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Brand: Brooks Instrument
Brooks Instrument GF80 Metal-Sealed Mass Flow Controller
Description
A compact metal-sealed mass flow controller with MultiFlo gas programming
The GF80 is a metal-sealed, digital thermal mass flow controller and meter from Brooks Instrument for process gases. Its seals are 316 stainless steel, so there are no elastomers to age and replace, and the datasheet credits the design with high internal and external leak integrity. The compact footprint is meant to ease retrofit into existing gas panels, and a wide choice of communication options lets it replace older analog or digital controllers.
Brooks calls its MultiFlo feature fourth-generation gas and range programmability. The database behind it is built from thousands of native gas measurements made on NIST-traceable metrology, creating gas models that consider thermal and physical differences between gases instead of a single conversion factor. The datasheet points to process development, research and simpler spares ownership as natural uses.
Technical specifications
| Parameter | Specification |
|---|---|
| Base model code | GF080: metal sealed, 0 to 55 slpm |
| Full-scale range (N2 eq.) | 3 sccm to 55 slm |
| Flow accuracy | +/-1% of setpoint (35 to 100%); +/-0.35% FS (2 to 35%) |
| Repeatability and reproducibility | Under +/-0.2% of setpoint |
| Linearity | +/-0.5% FS (included in accuracy) |
| Response time, normally closed valve | Under 1 s (within 2%, steps 0-10 to 0-100%) |
| Control range | 2 to 100% |
| MultiFlo | Optional; 11 bins |
| Valve shut-down | Under 1% FS |
| Zero stability | Under +/-0.5% FS per year |
| Pressure coefficient | 0.03% per psi (0 to 50 psi N2) |
| Auto shut-off | Valve closes when setpoint drops below 1.5% FS |
| Auto zero | Optional; zero performed each time setpoint returns to zero |
| Operating temperature | 5 to 50 C (41 to 122 F) |
| Maximum operating pressure | 150 psig (10 bar) |
| Differential pressure | 7 to 45 psid up to 860 sccm; 15 to 45 psid for 861 to 7200 sccm; 25 to 45 psid for 7201 to 50000 sccm |
| External leak integrity | 1×10-10 atm cc/sec He |
| Valve type | Normally closed, or meter |
| Wetted materials | 316 stainless steel, Hastelloy C-22, 17-7 PH, 430 SS |
| Seals and valve seat | 316 stainless steel; surface finish 16 micro-inch Ra |
| Alarms | Sensor output, control valve output, over temperature, power surge/sag, network interruption |
| Interfaces | RS485 (S, L, A protocols), Profibus, DeviceNet; analog 0-5 V, 0-10 V, 0-20 mA, 4-20 mA |
| Power | 12 to 24 Vdc 7 W (RS485/analog); 11 to 25 Vdc 13.6 W (DeviceNet) |
| Compliance | CE EN 61326, designed to meet EN 61010, RoHS |
Interfaces and model code
The three RS485 protocols are explained in the datasheet: S-Protocol is based on the HART command set, L-Protocol is compatible with legacy Unit and Celerity devices, and A-Protocol is compatible with Aera mass flow devices. Profibus and DeviceNet are also offered, and a service port with a 2.5 mm jack gives diagnostic access without taking the unit out of service.
In the ordering code, position II chooses whether the unit is MultiFlo capable, position IV a normally closed valve or a meter, and position V a gas and range or one of the standard bins SH40 to SH50, from 3 to 10 sccm to 40001 to 55000 sccm. Fitting is 1/4 inch VCR, downstream condition is atmosphere, vacuum or positive pressure, and the seal and seat code is metal on 316 stainless steel. The final position selects the communication and connector.
What to confirm before ordering
Send us the gas and range, supply and outlet pressures, whether the outlet is under vacuum, the fitting and footprint, and the control protocol of the existing system. The datasheet adds that argon needs roughly 10 psid more differential pressure and that lower supply pressure or differential pressure operation is available through the Brooks Customer Special Request process. The sheet is titled for both GF80 and GF81, but its content describes only the GF80, so tell us if you need the GF81.
How the Brooks GF80 works
A thermal sensor measures the mass flow of the gas. The electronics compare the reading with the setpoint. The control valve then opens or closes to hold the flow at the setpoint. MultiFlo gas models adjust the reading for the gas in use.
Where the GF80 is used
- Process development
- Research laboratories
- Gas panels
- Retrofit of older controllers
- Process gas delivery
Selection checklist for the GF80
- Gas type
- Full-scale flow range
- Operating pressure
- Differential pressure
- Valve type
- Communication interface
- MultiFlo option
- Fitting type
Installation, commissioning and maintenance notes for the GF80
Mount the controller in the position the datasheet gives. Keep the gas clean and dry. Connect the power and the interface. Set the gas and the range in the setup. Zero the unit with no flow and the line pressurised.
Requesting a quotation for the Brooks GF80
Please send the gas, the flow range and the interface. Seven Star LLC serves industrial customers in Oman and the GCC and replies with a quotation based on the information provided.
GF80 controller type
It is a digital thermal mass flow controller.
GF80 seals
The seals are 316 stainless steel.
GF80 base model
The base model GF080 covers 0 to 55 slpm.
GF80 flow range
The full-scale range is 3 sccm to 55 slm.
GF80 control range
The control range is 2 to 100 percent.
GF80 MultiFlo
MultiFlo gas programming is an option.
GF80 response time
The response time is under 1 second.
GF80 valve type
The valve is normally closed, or the unit is a meter.
GF80 operating temperature
The range is 5 to 50 degrees C.
GF80 maximum pressure
The maximum operating pressure is 150 psig.
GF80 wetted materials
They are 316 stainless steel, Hastelloy C-22, 17-7 PH and 430 SS.
GF80 surface finish
The surface finish is 16 micro-inch Ra.
GF80 leak integrity
The external leak integrity is 1×10-10 atm cc/sec He.
GF80 auto shut-off
The valve closes when the setpoint drops below 1.5 percent of full scale.
GF80 auto zero
Auto zero is an option.
GF80 alarms
Alarms include over temperature and network interruption.
GF80 interfaces
The interfaces include RS485, Profibus and DeviceNet.
GF80 footprint
The compact footprint eases retrofit into gas panels.
Controller records for the GF80
Record the gas, the range and the zero checks.
Choosing the right GF80 gas setup
Choose the gas model and the range from the process.
Documents and quotation
The manufacturer datasheet is attached to this page as a download. For a quotation, send the full model code and the process data to Seven Star LLC in Muscat; browse more instruments in the Flowmeters category. We supply this item as an independent supplier, so please confirm availability and delivery with us.
Datasheets & Documents
- Datasheet Brooks Instrument GF80 Series datasheet (file Data-Sheet-GF80-GF81-EN, 2024-12) Download
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About brand
Brooks Instrument makes mass flow controllers, flowmeters and pressure and vacuum instruments for gases and liquids. The industrial chemist Stephen A. Brooks started the business in 1946 as the Brooks Rotameter Company near Philadelphia, building variable area flowmeters. After many years as part of Emerson, Brooks was sold to American Industrial Partners at the end of 2007 and has been a division of Illinois Tool Works (ITW) since January 2012. It is headquartered in Hatfield, Pennsylvania.
Seven Star LLC is an independent supplier listing Brooks Instrument thermal and Coriolis mass flow controllers and variable area flowmeters for buyers in Oman and the GCC. Instruments are matched from the model code and the gas, range and calibration data on the label.
Brooks Instrument at a glance
| Origin | Founded in 1946 by Stephen A. Brooks as the Brooks Rotameter Company, Lansdale, Pennsylvania |
|---|---|
| Headquarters | Hatfield, Pennsylvania, USA |
| Ownership | Emerson division until 31 December 2007, then American Industrial Partners; part of ITW since January 2012 |
| Product families | Thermal, pressure-based and Coriolis mass flow controllers and meters, metal tube and glass tube variable area flowmeters, pressure and vacuum products |
| Typical duty | Precise gas and liquid flow control in process, laboratory, analyser, fuel cell and semiconductor applications |
Brooks mass flow controllers and flowmeters
| Series | Type | Typical use |
|---|---|---|
| SLA5800, SLAMf | Thermal mass flow controllers and meters | Gas flow control in process and analytical systems; SLAMf with an IP66 enclosure for harsh or outdoor locations |
| 5800E | Analog thermal mass flow controller | Installed base in older systems; often replaced with the SLA5800 series |
| Quantim QMC | Coriolis mass flow controller | Low-flow liquid and gas control independent of fluid properties |
| GF40, GF80, GF100, GP200 | Metal-sealed thermal and pressure-based mass flow controllers | High-purity and semiconductor gas delivery; MultiFlo allows gas and range changes without recalibration |
| MT3750C, MT3809G | Metal tube variable area flowmeters | Purge, chemical injection and utility flows at higher pressure and temperature, with optional transmitter and alarms |
| GT1600, Sho-Rate 1250/1255 | Glass tube variable area flowmeters | Visual flow indication on purge, sample and laboratory lines |
Where Brooks instruments are used
Brooks mass flow controllers dose gases in analyser systems, catalyst and pilot plant testing, gas blending, burner and combustion control, fuel cell test stands and semiconductor tools. Variable area flowmeters are widely used on purge gas, seal flush, sample and chemical injection lines in oil and gas, refining and petrochemical plants, where a simple local indication without external power is preferred.
Ordering Brooks instruments: what we need
Send the full model code and serial number from the label. Mass flow controllers are calibrated for a specific gas and full-scale flow, so state the gas or gas mixture, flow range, inlet and outlet pressure, temperature, process connection, seal material, signal (analog, RS-485, DeviceNet, EtherNet/IP or other) and any hazardous-area requirement. For variable area meters add the fluid, density, viscosity, flow range, connection size, materials and whether alarms or a 4-20 mA output are needed.
Facts checked against Brooks Instrument company information and product data, October 2026.
Browse Brooks Instrument products by category: Flowmeters.
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Frequently Asked Questions
316 stainless steel external and internal seals, with a 316 stainless steel valve seat.
3 sccm to 55 slm nitrogen equivalent.
MultiFlo is listed as optional; the code selects a MultiFlo capable or a fixed gas and range unit.
Brooks S-Protocol, L-Protocol for legacy Unit and Celerity devices, and A-Protocol compatible with Aera devices.
150 psig (10 bar) per the datasheet.

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