Brooks Instrument GF100 Metal-Sealed Mass Flow Controller

Name: Brooks GF100 Metal-Sealed Mass Flow Controller – Datasheet
Brand: Brooks Instrument
SKU: GF100

Description

Metal-sealed mass flow control for high-purity gas systems

The GF100 Series is the Brooks Instrument family of metal-sealed, high-purity and ultra-high-purity thermal mass flow controllers and meters for gases. Brooks designed it for semiconductor, MOCVD and other processes that need an all-metal flow path, so it is a specialist product rather than a general utility controller. The datasheet describes drop-in replacement and upgrade of most brands of metal-seal mass flow controller, including the former Celerity, UNIT, Tylan and Mykrolis designs, and states that the series was life tested to over three times the semiconductor industry standard for reliability.

The sheet covers the GF100, GF120 and GF125 for 3 sccm to 55 slm, the GF101, GF121 and GF126 for 55 to 300 slm, and the GF120XSL and GF120XSD safe-delivery versions for sub-atmospheric gases. MultiFlo technology lets one controller serve many gases and ranges without leaving the gas line.

Technical specifications

Parameter	Specification
Models on this datasheet	GF100, GF120, GF125, GF120XSL, GF120XSD; GF101, GF121, GF126
Full-scale range	3 sccm to 55 slm (GF100/120/125); 4 to 25 sccm (XSL) and above 25 sccm to 1 slm (XSD); 55 to 300 slm (GF101/121/126)
Flow accuracy	+/-1% of setpoint above 35 to 100%; +/-0.35% FS for 2 to 35%
Repeatability	+/-0.15% of setpoint for 5 to 100%; +/-0.015% FS for 2 to 5% (smaller bodies)
Response time, normally closed valve	Under 1 s (GF100); 700 ms (GF120); 300 to 700 ms depending on range (GF125)
Control range	2 to 100% (normally closed), 3 to 100% (normally open); 5 to 100% on 55 to 300 slm models
MultiFlo bins	11 bins (up to 55 slm); 4 bins (55 to 300 slm)
Valve shut-down	Standard Hastelloy valve under 1% FS; optional zero leak-by valve under 0.02% FS (SH40-41) or 0.005% FS (SH42-50)
Zero stability	Under +/-0.5% FS per year
Temperature coefficient	Zero 0.005% FS per C; span 0.05% FS per C
Operating temperature	10 to 50 C
Differential pressure	7 to 45 psid up to 860 sccm; 10 to 45 psid up to 7200 sccm; 15 to 45 psid up to 55000 sccm; 30 to 90 psid for 55 to 300 slm
Maximum operating pressure	500 psia (GF100/125); 100 psia (GF120 SDS); 75 psig controller and 150 psig meter on 55 to 300 slm
External leak integrity	1×10-10 atm cc/sec He
Wetted materials	SEMI F20 HP compliant 316L VIM/VAR, Hastelloy C-22, 316L and 304 stainless steel, KM-45; PCTFE on zero leak-by valve
Surface finish	10 micro-inch Ra (GF100); 5 micro-inch Ra (GF120/125)
Display	Top-mounted integrated LCD, flow, temperature and pressure
Interfaces	RS485/analog via 9-pin D connector; DeviceNet via 5-pin M12; RS485 service port via 2.5 mm jack
Power	6 W max at +/-15 Vdc or +24 Vdc (RS485/analog); DeviceNet 545 mA max at 11 to 25 Vdc
Compliance	CE EN 61326, RoHS 2011/65/EU, REACH EC 1907/2006

Reading the GF100 model code

The base code is GF, followed by the package: 100 for a 1-second response and 10 micro-inch finish, 120 for a 700 ms response and 5 micro-inch finish, and 125 for the pressure-transient-insensitive version with 300 to 700 ms response. Further positions select MultiFlo capability, special application (standard, SL or SD safe delivery), valve configuration (normally closed, normally open or meter), the gas and range or one of the standard bins SH40 to SH50, and the body width and seal type. Face-seal choices include VCR, C-seal and W-seal in 79.8, 92 and 124 mm lengths. A downstream condition and communication code complete the number.

What to confirm before ordering

Confirm the process gas, full-scale range, inlet and outlet pressure, valve action, footprint and seal type of the position being replaced, communication protocol and surface-finish requirement. The datasheet says argon needs about 10 psid extra differential pressure and that units above 30 slm need a minimum 45 psia inlet. It also notes that accuracy and response with analog communications should be checked with Brooks applications engineering. This datasheet covers the analog and DeviceNet versions.

How the Brooks GF100 works

A small part of the gas flows through a bypass sensor tube with heat applied. The gas carries heat from one sensor to the other, and the difference is a measure of mass flow. The controller compares it with the setpoint and moves the valve to hold the flow, all inside an all-metal flow path.

Where the GF100 is used

Semiconductor process tools
MOCVD systems
High-purity gas panels
Ultra-high-purity gas delivery
Replacement of older metal-seal controllers

Selection checklist for the GF100

Process gas
Full-scale range
Model in the series
Valve normally closed or open
Shut-down valve type
Inlet pressure
Differential pressure available
Communication interface

Installation, commissioning and maintenance notes for the GF100

Mount the controller on a clean gas panel with the correct seals. Leak-check the connections before use. Confirm the gas and range selected in the gas model, check the zero with no flow and keep the inlet gas clean and dry.

Requesting a quotation for the Brooks GF100

Please send the gas, the flow range, the model and the connection type. Seven Star LLC serves industrial customers in Oman and the GCC and replies with a quotation based on the information provided.

GF100 controller type

It is a metal-sealed thermal mass flow controller for gases.

GF100 purity grade

It is made for high-purity and ultra-high-purity service.

GF100 target processes

Brooks designed it for semiconductor, MOCVD and other processes that need an all-metal flow path.

GF100 replacement use

The datasheet describes drop-in replacement of most brands of metal-seal mass flow controller.

GF100 former designs

These include the former Celerity, UNIT, Tylan and Mykrolis designs.

GF100 standard models

The GF100, GF120 and GF125 cover 3 sccm to 55 slm.

GF100 high flow models

The GF101, GF121 and GF126 cover 55 to 300 slm.

GF100 safe-delivery models

The GF120XSL and GF120XSD are safe-delivery versions for sub-atmospheric gases.

GF100 XSL range

The XSL covers 4 to 25 sccm.

GF100 XSD range

The XSD covers above 25 sccm to 1 slm.

GF100 MultiFlo

MultiFlo lets one controller serve many gases and ranges without leaving the gas line.

GF100 MultiFlo bins

There are 11 bins up to 55 slm and 4 bins from 55 to 300 slm.

GF100 control range

The range is 2 to 100 percent for a normally closed valve and 3 to 100 percent for a normally open valve.

GF100 response time

The response is under 1 second on the GF100 and 700 ms on the GF120.

GF100 GF125 response

The GF125 responds in 300 to 700 ms depending on range.

GF100 standard valve

The standard valve is Hastelloy.

GF100 zero leak-by valve

An optional zero leak-by valve is available.

GF100 operating temperature

The operating temperature is 10 to 50 degrees C.

GF100 small flow pressure

Up to 860 sccm the differential pressure is 7 to 45 psid.

GF100 mid flow pressure

Up to 7200 sccm the differential pressure is 10 to 45 psid.

GF100 large flow pressure

Up to 55000 sccm the differential pressure is 15 to 45 psid.

GF100 high flow pressure

For 55 to 300 slm the differential pressure is 30 to 90 psid.

GF100 maximum pressure

The maximum operating pressure is 500 psia on the GF100 and GF125.

Controller records for the GF100

Record the gas, the range, the model and the date of each zero check.

Choosing the right GF100 model

Choose the model from the flow range and the type of process gas.

Documents and quotation

The manufacturer datasheet (12 pages) is attached to this page as a download. For a quotation, send the full model code and the process data to Seven Star LLC in Muscat; browse more instruments in the Flowmeters category. We supply this item as an independent supplier, so please confirm availability and delivery with us.

Datasheets & Documents

Datasheet Brooks Instrument GF100 Series datasheet (Analog, DeviceNet) Download

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About brand

Brooks Instrument makes mass flow controllers, flowmeters and pressure and vacuum instruments for gases and liquids. The industrial chemist Stephen A. Brooks started the business in 1946 as the Brooks Rotameter Company near Philadelphia, building variable area flowmeters. After many years as part of Emerson, Brooks was sold to American Industrial Partners at the end of 2007 and has been a division of Illinois Tool Works (ITW) since January 2012. It is headquartered in Hatfield, Pennsylvania.

Seven Star LLC is an independent supplier listing Brooks Instrument thermal and Coriolis mass flow controllers and variable area flowmeters for buyers in Oman and the GCC. Instruments are matched from the model code and the gas, range and calibration data on the label.

Brooks Instrument at a glance

Origin	Founded in 1946 by Stephen A. Brooks as the Brooks Rotameter Company, Lansdale, Pennsylvania
Headquarters	Hatfield, Pennsylvania, USA
Ownership	Emerson division until 31 December 2007, then American Industrial Partners; part of ITW since January 2012
Product families	Thermal, pressure-based and Coriolis mass flow controllers and meters, metal tube and glass tube variable area flowmeters, pressure and vacuum products
Typical duty	Precise gas and liquid flow control in process, laboratory, analyser, fuel cell and semiconductor applications

Brooks mass flow controllers and flowmeters

Series	Type	Typical use
SLA5800, SLAMf	Thermal mass flow controllers and meters	Gas flow control in process and analytical systems; SLAMf with an IP66 enclosure for harsh or outdoor locations
5800E	Analog thermal mass flow controller	Installed base in older systems; often replaced with the SLA5800 series
Quantim QMC	Coriolis mass flow controller	Low-flow liquid and gas control independent of fluid properties
GF40, GF80, GF100, GP200	Metal-sealed thermal and pressure-based mass flow controllers	High-purity and semiconductor gas delivery; MultiFlo allows gas and range changes without recalibration
MT3750C, MT3809G	Metal tube variable area flowmeters	Purge, chemical injection and utility flows at higher pressure and temperature, with optional transmitter and alarms
GT1600, Sho-Rate 1250/1255	Glass tube variable area flowmeters	Visual flow indication on purge, sample and laboratory lines

Where Brooks instruments are used

Brooks mass flow controllers dose gases in analyser systems, catalyst and pilot plant testing, gas blending, burner and combustion control, fuel cell test stands and semiconductor tools. Variable area flowmeters are widely used on purge gas, seal flush, sample and chemical injection lines in oil and gas, refining and petrochemical plants, where a simple local indication without external power is preferred.

Ordering Brooks instruments: what we need

Send the full model code and serial number from the label. Mass flow controllers are calibrated for a specific gas and full-scale flow, so state the gas or gas mixture, flow range, inlet and outlet pressure, temperature, process connection, seal material, signal (analog, RS-485, DeviceNet, EtherNet/IP or other) and any hazardous-area requirement. For variable area meters add the fluid, density, viscosity, flow range, connection size, materials and whether alarms or a 4-20 mA output are needed.

Facts checked against Brooks Instrument company information and product data, October 2026.

Browse Brooks Instrument products by category: Flowmeters.