Brooks Instrument GP200 Pressure-Based Mass Flow Controller

Name: Brooks GP200 Pressure-Based MFC – Datasheet & Quote
Brand: Brooks Instrument
SKU: GP200

Description

Pressure-based mass flow control that ignores inlet and outlet pressure swings

The GP200 is a metal-sealed, digital, ultra-high-purity pressure-based mass flow controller (P-MFC) for gases. Brooks describes it as the first inlet and outlet pressure insensitive P-MFC and designed it specifically for semiconductor applications, so it is a specialist component for gas panels in that field rather than a general industrial flow controller. A patented differential pressure sensor and a downstream valve architecture are intended to remove the limits of earlier pressure-based designs.

The MultiFlo gas model is embedded in each unit, allowing gas and range to be reconfigured on the fly. During supply disruptions of up to 40 psi per second the flow is held within 1 percent of setpoint, and the downstream valve can deliver flow into outlet pressures up to 1200 Torr. A low-pressure option serves etch gases such as SiCl4, BCl3 and C4F6.

Technical specifications

Parameter	Specification
Full-scale range	3 sccm to 50,000 sccm N2 equivalent; nine standard bins
Process gas accuracy, zero-leak valve	Under +/-1% of setpoint (5 to 100% FS); under +/-0.05% FS (0.5 to 5% FS)
Process gas accuracy, metal-seal valve	Under +/-1% of setpoint (5 to 100% FS); under +/-0.05% FS (2 to 5% FS)
Control range	0.5 to 100% FS (zero-leak valve); 2 to 100% FS (metal-seal valve)
Repeatability and reproducibility	+/-0.15% of setpoint (5 to 100%); +/-0.015% FS (0.5 or 2 to 5%)
Transient response	280 +/-20 ms matched transient response for ascending or descending non-zero setpoints
Valve leak-by	Zero-leak valve under 0.005% FS of bin (bins 42-46), under 0.02% (bins 40-41); metal-seal valve under 0.15% FS of bin at 45 psia to vacuum
Supply pressure insensitivity	Under +/-1% of setpoint up to 40 psi/sec inlet spike
Dynamic back-pressure insensitivity	Maintains accuracy for vacuum to 1200 Torr disturbance over 1 second
Zero stability	Under +/-0.15% FS per year
Temperature coefficient	Zero 0.005% FS per C; span 0.05% of setpoint per C
Operating temperature	10 to 60 C
Operating inlet pressure	Under 15 psia for low-pressure bins; 15 to 30, 25 to 40, 35 to 50 or 45 to 60 psia
Differential pressure	7 psid typical minimum, up to 50 psid maximum
Pressure ratings	Proof 100 psia (CT bins) or 45 psia (LP bins); design 150 psia; burst 1000 psia
External leak integrity	1×10-10 atm cc/sec He
Valve type	Normally closed
Wetted materials	316L, Hastelloy C-22, 316/316L and 304 stainless steel, KM-45, PCTFE; 5 micro-inch Ra average
Display	Top-mounted rotatable LCD showing flow, temperature and pressure
Interfaces	DeviceNet, EtherCAT, RS485/analog 0-5 V; micro-USB RS485 diagnostic port
Compliance	EMC 2014/30/EU EN 61326-1, RoHS 2011/65/EU and 2015/863/EU, REACH EC 1907/2006

Understanding the bins and ordering code

The ordering code starts with GP200 and a valve choice: P for a positive shut-off, zero leak-by valve or C for a normally closed valve with a metal seat. The gas and range field holds a Brooks gas code and a full scale, for example the standard bins from 10 sccm (CT40) up to 45,000 sccm (CT48) at 35 psia inlet and vacuum outlet. A bin type selects the standard (CT) or low-pressure (LP) family, the latter in bins 40 to 46. Fitting options are 1-1/8 inch body width with C-seal, W-seal, C-seal with poka-yoke or a 124 mm male 1/4 inch VCR version. The base I/O codes are G1 for analog with RS485, TX for analog only, E0 for EtherCAT and DX for DeviceNet.

What to confirm before ordering

Provide the gas, flow and bin, inlet pressure window and outlet condition, fitting footprint, I/O type and whether zero leak-by is required. The datasheet advises using the Brooks Configurator and bin tables for gas-specific inlet pressure options, and says the lowest controllable setpoint for the smallest bins is about 1 percent of the bin at 35 psia, which is 0.1 sccm nitrogen. The device should be zeroed at ambient operating temperature.

How the Brooks GP200 works

A differential pressure sensor measures the pressure drop across a restriction and a downstream valve sets the flow. The embedded gas model converts the reading into mass flow for the selected gas. The result is a controller that does not react to supply or outlet pressure changes.

Where the GP200 is used

Semiconductor process gas panels
Etch process tools
Deposition tools
Ultra-high-purity gas delivery
Multi-gas process chambers

Selection checklist for the GP200

Process gas
Full-scale range bin
Valve type
Inlet pressure range
Outlet pressure
Differential pressure available
Communication interface
Seal material

Installation, commissioning and maintenance notes for the GP200

Install the controller on a clean, purged gas panel with the base mounting face flat. Leak-check the connections. Confirm the gas and range in the embedded gas model and check the zero before first use. Keep the inlet gas clean and dry.

Requesting a quotation for the Brooks GP200

Please send the gas, the flow range, the valve type and the inlet and outlet pressures. Seven Star LLC serves industrial customers in Oman and the GCC and replies with a quotation based on the information provided.

GP200 controller type

It is a metal-sealed, digital, ultra-high-purity pressure-based mass flow controller.

GP200 target field

Brooks designed it specifically for semiconductor applications.

GP200 pressure insensitivity

Brooks describes it as the first inlet and outlet pressure insensitive pressure-based mass flow controller.

GP200 sensor

A patented differential pressure sensor is used.

GP200 valve architecture

The valve is mounted downstream of the sensor.

GP200 gas model

The MultiFlo gas model is embedded in each unit.

GP200 reconfiguration

Gas and range can be reconfigured on the fly.

GP200 supply disruptions

Flow is held during supply disruptions of up to 40 psi per second.

GP200 outlet pressure

The downstream valve can deliver flow into outlet pressures up to 1200 Torr.

GP200 low pressure option

A low-pressure option serves etch gases such as SiCl4, BCl3 and C4F6.

GP200 full-scale range

The range is 3 sccm to 50,000 sccm nitrogen equivalent.

GP200 range bins

There are nine standard bins.

GP200 valve options

A zero-leak valve and a metal-seal valve are offered.

GP200 zero-leak control range

With the zero-leak valve the control range is 0.5 to 100 percent of full scale.

GP200 metal-seal control range

With the metal-seal valve the control range is 2 to 100 percent of full scale.

GP200 transient response

The matched transient response is about 280 ms for ascending or descending non-zero setpoints.

GP200 back pressure

It maintains control through a vacuum to 1200 Torr disturbance over 1 second.

GP200 operating temperature

The operating temperature is 10 to 60 degrees C.

GP200 low pressure bins

Low-pressure bins operate at an inlet pressure under 15 psia.

GP200 inlet pressure ranges

Other ranges are 15 to 30, 25 to 40, 35 to 50 and 45 to 60 psia.

GP200 differential pressure

A typical minimum of 7 psid is needed, up to a maximum of 50 psid.

GP200 temperature effect

The zero temperature coefficient is 0.005 percent of full scale per degree C.

GP200 span temperature effect

The span temperature coefficient is 0.05 percent of setpoint per degree C.

Controller records for the GP200

Record the gas, the range bin, the valve type and the date of each zero check.

Choosing the right GP200 valve

Choose the valve from the leak-by and control range your process needs.

Documents and quotation

The manufacturer datasheet is attached to this page as a download. For a quotation, send the full model code and the process data to Seven Star LLC in Muscat; browse more instruments in the Flowmeters category. We supply this item as an independent supplier, so please confirm availability and delivery with us.

Datasheets & Documents

Datasheet Brooks Instrument GP200 Series datasheet Download

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About brand

Brooks Instrument makes mass flow controllers, flowmeters and pressure and vacuum instruments for gases and liquids. The industrial chemist Stephen A. Brooks started the business in 1946 as the Brooks Rotameter Company near Philadelphia, building variable area flowmeters. After many years as part of Emerson, Brooks was sold to American Industrial Partners at the end of 2007 and has been a division of Illinois Tool Works (ITW) since January 2012. It is headquartered in Hatfield, Pennsylvania.

Seven Star LLC is an independent supplier listing Brooks Instrument thermal and Coriolis mass flow controllers and variable area flowmeters for buyers in Oman and the GCC. Instruments are matched from the model code and the gas, range and calibration data on the label.

Brooks Instrument at a glance

Origin	Founded in 1946 by Stephen A. Brooks as the Brooks Rotameter Company, Lansdale, Pennsylvania
Headquarters	Hatfield, Pennsylvania, USA
Ownership	Emerson division until 31 December 2007, then American Industrial Partners; part of ITW since January 2012
Product families	Thermal, pressure-based and Coriolis mass flow controllers and meters, metal tube and glass tube variable area flowmeters, pressure and vacuum products
Typical duty	Precise gas and liquid flow control in process, laboratory, analyser, fuel cell and semiconductor applications

Brooks mass flow controllers and flowmeters

Series	Type	Typical use
SLA5800, SLAMf	Thermal mass flow controllers and meters	Gas flow control in process and analytical systems; SLAMf with an IP66 enclosure for harsh or outdoor locations
5800E	Analog thermal mass flow controller	Installed base in older systems; often replaced with the SLA5800 series
Quantim QMC	Coriolis mass flow controller	Low-flow liquid and gas control independent of fluid properties
GF40, GF80, GF100, GP200	Metal-sealed thermal and pressure-based mass flow controllers	High-purity and semiconductor gas delivery; MultiFlo allows gas and range changes without recalibration
MT3750C, MT3809G	Metal tube variable area flowmeters	Purge, chemical injection and utility flows at higher pressure and temperature, with optional transmitter and alarms
GT1600, Sho-Rate 1250/1255	Glass tube variable area flowmeters	Visual flow indication on purge, sample and laboratory lines

Where Brooks instruments are used

Brooks mass flow controllers dose gases in analyser systems, catalyst and pilot plant testing, gas blending, burner and combustion control, fuel cell test stands and semiconductor tools. Variable area flowmeters are widely used on purge gas, seal flush, sample and chemical injection lines in oil and gas, refining and petrochemical plants, where a simple local indication without external power is preferred.

Ordering Brooks instruments: what we need

Send the full model code and serial number from the label. Mass flow controllers are calibrated for a specific gas and full-scale flow, so state the gas or gas mixture, flow range, inlet and outlet pressure, temperature, process connection, seal material, signal (analog, RS-485, DeviceNet, EtherNet/IP or other) and any hazardous-area requirement. For variable area meters add the fluid, density, viscosity, flow range, connection size, materials and whether alarms or a 4-20 mA output are needed.

Facts checked against Brooks Instrument company information and product data, October 2026.

Browse Brooks Instrument products by category: Flowmeters.