Brooks Instrument SLAMf Series IP66 Thermal Mass Flow Controller

Description

Gas mass flow control in a dust-tight, washdown-rated housing

The SLAMf Series takes the sensor and valve technology of the Brooks SLA family and places the electronics in an IP66 enclosure that is also available with hazardous-area approvals. It is aimed at plants where a standard flow controller would face dust, moisture, hose-down cleaning, temperature extremes or explosive atmospheres. The controllers are the SLAMf50, SLAMf51 and SLAMf53 and the meters are the SLAMf60, SLAMf61, SLAMf63 and SLAMf64.

Brooks describes a modular platform intended for drop-in replacement and upgrade of many other brands of mass flow controller, with a broad choice of analog and digital interfaces. Typical fields named in the datasheet are chemical and petrochemical research, laboratory, analytical, fuel cell, biotechnology and life science applications.

Technical specifications

Parameter Specification
Controller models SLAMf50, SLAMf51, SLAMf53
Meter models SLAMf60, SLAMf61, SLAMf63, SLAMf64
Full-scale range (N2 eq., 0 C ref) 0.003 to 50 slpm; 15 to 150 slpm; 100 to 1100 slpm; 1100 to 2500 slpm; SLAMf64 meter 60 to 540 m3/hr
Accuracy, 17025-certified devices +/-0.6% of setpoint (20 to 100% FS), +/-0.12% FS below 20% FS; +/-0.6% FS on larger bodies
Accuracy incl. calibration uncertainty (SEMI E69) +/-0.9% of setpoint, +/-0.18% FS below 20% FS; +/-1.0% FS on larger bodies
Control range 1 to 100% FS, 100:1 for 1 to 50 slpm; 50:1 for other full-scale flows
Repeatability 0.20% of setpoint (SLAMf64: +/-0.25% of setpoint)
Response time Under 1 second (small and mid bodies); under 3 seconds (large body)
Zero stability Under 0.2% FS per year
Operating temperature -14 to 65 C; hazardous-area certifications 0 to 65 C
Maximum operating pressure 1500 psi / 103 bar (sizes 50, 51); 1000 psi / 69 bar (size 53); SLAMf64 2 in and 3 in 85 bar, 4 in 70 bar
Maximum differential pressure (controllers) Application specific up to 1500 psi / 103 bar (sizes 50, 51); up to 290 psi / 20 bar (size 53)
External leak integrity 1×10-9 atm cc/sec He
Enclosure IP66; electrical entry via terminal block with 1/2 in NPT (F) conduit, optional PG11 gland or M20x1.5
Digital interfaces RS485, Profibus, DeviceNet, EtherNet/IP, PROFINET
Analog I/O 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
Power +13.5 to +27 Vdc (RS485/analog); 11 to 25 Vdc (DeviceNet); watts depend on valve orifice
Hazardous area options UL Listed or Recognized Class I Div 2, Zone 2; ATEX II 3 G Ex ec IIC T4 Gc and II 3 D Ex tc IIIC T85 C; IECEx; KOSHA
Status indication MFC health and network status lights; RS485 service port via 2.5 mm jack

Selecting body size, connection and certification

The SLAMf ordering code follows the SLA structure with the base model letters SLA, package MF, a function digit (5 controller, 6 meter) and a body-size digit: 0 for 3 ccm to 50 lpm, 1 for 15 to 150 lpm, 3 for 100 to 2500 lpm and 4 for 1000 to 20833 lpm nitrogen equivalent. Digital communication choices include DeviceNet and Profibus variants with M20 conduit or PG11 cable gland, RS485, EtherNet/IP and PROFINET.

Position XIII sets the area certification: safe area, Zone 2 ATEX, Div 2 / Zone 2 UL Listed, UL Recognized, Zone 2 IECEx or KOSHA. The Biotech Performance and Premium packages, with optional CO2 actual-gas calibration on the two smaller bodies, are selected in position XII.

What to confirm before ordering

Tell us the gas, flow range, line pressures, fitting, valve action, supply voltage, interface and the exact area classification of the installation. The datasheet limits hazardous-area versions to 0 to 65 C, and warns that more than 40 psig inlet is required above 100 lpm of nitrogen equivalent. A nameplate code from an existing unit makes a like-for-like check faster.

How the Brooks SLAMf works

A thermal sensor measures the mass flow of the gas in a small bypass. The electronics compare the reading with the setpoint. A control valve then opens or closes to hold the flow at the setpoint. The electronics sit in a sealed housing.

Where the SLAMf is used

  • Chemical and petrochemical research
  • Laboratory work
  • Analytical systems
  • Fuel cell test rigs
  • Biotechnology and life science

Selection checklist for the SLAMf

  • Controller or meter
  • Gas and full-scale flow
  • Operating pressure
  • Differential pressure
  • Digital interface
  • Analog signal
  • Conduit entry type
  • Area classification

Installation, commissioning and maintenance notes for the SLAMf

Fit the device on a clean gas line in the stated direction. Wire the supply and the signal through the conduit entry. Leak-check the fittings. Check the zero with no flow. Keep the gas dry and free of particles.

Requesting a quotation for the Brooks SLAMf

Please send the gas, the flow range, the pressure and the interface. Seven Star LLC serves industrial customers in Oman and the GCC and replies with a quotation based on the information provided.

SLAMf product family

The SLAMf series builds on the sensor and valve of the Brooks SLA family.

SLAMf controller models

The controllers are the SLAMf50, SLAMf51 and SLAMf53.

SLAMf meter models

The meters are the SLAMf60, SLAMf61, SLAMf63 and SLAMf64.

SLAMf enclosure

The enclosure is rated IP66.

SLAMf flow range

Full-scale flows run from 0.003 slpm to 2500 slpm.

SLAMf control range

The control range is 1 to 100 percent of full scale.

SLAMf response time

The response time is under 1 second on small and mid bodies.

SLAMf zero stability

Zero stability is under 0.2 percent of full scale per year.

SLAMf operating temperature

The operating range is minus 14 to 65 degrees C.

SLAMf leak integrity

External leak integrity is 1×10-9 atm cc/sec He.

SLAMf digital interfaces

Digital options include RS485, Profibus, DeviceNet, EtherNet/IP and PROFINET.

SLAMf electrical entry

Entry is by terminal block with a 1/2 in NPT conduit connection.

Gas flow records for the SLAMf

Record the setpoint, the gas and the zero check results.

Choosing the right SLAMf body size

Choose the body size from the flow range and the pressure drop available.

Documents and quotation

The manufacturer datasheet is attached to this page as a download. For a quotation, send the full model code and the process data to Seven Star LLC in Muscat; browse more instruments in the Flowmeters category. We supply this item as an independent supplier, so please confirm availability and delivery with us.

Datasheets & Documents
  • PDF Datasheet Brooks Instrument SLAMf Series datasheet Download
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About brand

Brooks Instrument makes mass flow controllers, flowmeters and pressure and vacuum instruments for gases and liquids. The industrial chemist Stephen A. Brooks started the business in 1946 as the Brooks Rotameter Company near Philadelphia, building variable area flowmeters. After many years as part of Emerson, Brooks was sold to American Industrial Partners at the end of 2007 and has been a division of Illinois Tool Works (ITW) since January 2012. It is headquartered in Hatfield, Pennsylvania.

Seven Star LLC is an independent supplier listing Brooks Instrument thermal and Coriolis mass flow controllers and variable area flowmeters for buyers in Oman and the GCC. Instruments are matched from the model code and the gas, range and calibration data on the label.

Brooks Instrument at a glance

Origin Founded in 1946 by Stephen A. Brooks as the Brooks Rotameter Company, Lansdale, Pennsylvania
Headquarters Hatfield, Pennsylvania, USA
Ownership Emerson division until 31 December 2007, then American Industrial Partners; part of ITW since January 2012
Product families Thermal, pressure-based and Coriolis mass flow controllers and meters, metal tube and glass tube variable area flowmeters, pressure and vacuum products
Typical duty Precise gas and liquid flow control in process, laboratory, analyser, fuel cell and semiconductor applications

Brooks mass flow controllers and flowmeters

Series Type Typical use
SLA5800, SLAMf Thermal mass flow controllers and meters Gas flow control in process and analytical systems; SLAMf with an IP66 enclosure for harsh or outdoor locations
5800E Analog thermal mass flow controller Installed base in older systems; often replaced with the SLA5800 series
Quantim QMC Coriolis mass flow controller Low-flow liquid and gas control independent of fluid properties
GF40, GF80, GF100, GP200 Metal-sealed thermal and pressure-based mass flow controllers High-purity and semiconductor gas delivery; MultiFlo allows gas and range changes without recalibration
MT3750C, MT3809G Metal tube variable area flowmeters Purge, chemical injection and utility flows at higher pressure and temperature, with optional transmitter and alarms
GT1600, Sho-Rate 1250/1255 Glass tube variable area flowmeters Visual flow indication on purge, sample and laboratory lines

Where Brooks instruments are used

Brooks mass flow controllers dose gases in analyser systems, catalyst and pilot plant testing, gas blending, burner and combustion control, fuel cell test stands and semiconductor tools. Variable area flowmeters are widely used on purge gas, seal flush, sample and chemical injection lines in oil and gas, refining and petrochemical plants, where a simple local indication without external power is preferred.

Ordering Brooks instruments: what we need

Send the full model code and serial number from the label. Mass flow controllers are calibrated for a specific gas and full-scale flow, so state the gas or gas mixture, flow range, inlet and outlet pressure, temperature, process connection, seal material, signal (analog, RS-485, DeviceNet, EtherNet/IP or other) and any hazardous-area requirement. For variable area meters add the fluid, density, viscosity, flow range, connection size, materials and whether alarms or a 4-20 mA output are needed.

Facts checked against Brooks Instrument company information and product data, October 2026.

Frequently Asked Questions

What makes SLAMf different from SLA5800?
The electronics sit in an IP66 enclosure with optional hazardous-area certification, for dust, moisture and washdown conditions.
Which models are in the series?
Controllers SLAMf50, 51 and 53, and meters SLAMf60, 61, 63 and 64.
What is the largest flow range?
The SLAMf64 meter is listed for 60 to 540 m3/hr; controllers go to 2500 slpm nitrogen equivalent.
Which certifications can be ordered?
UL Class I Div 2, ATEX Zone 2, IECEx Zone 2 and KOSHA through ordering position XIII.
Which interfaces are supported?
RS485, Profibus, DeviceNet, EtherNet/IP and PROFINET, plus analog I/O.